A 12-side polygon vacuum chamber with high-vacuum performance

Project details:

• An aluminium optical table for the whole chamber with thickness of 50 mm,
  completely manufactured at our location in Štěnovice
• Internal working area is Ø1,500 x 500 mm
• Chamber frame made of stainless steel
• Chamber lid, including ribs and flanges, made of aluminium
• 30 mm thick side plates are made of aluminium as well

Operational conditions:

• Operating presure: 1 x 10^-6 mbar
• ISO 6 clearoom compaitibility acc. to EN ISO 14644