Reference Projects

A 12-side polygon vacuum chamber with high-vacuum performance

Project details:

  • An aluminium optical table for the whole chamber with thickness of 50 mm,
    completely manufactured at our location in Štěnovice
  • Internal working area is Ø1,500 x 500 mm
  • Chamber frame made of stainless steel
  • Chamber lid, including ribs and flanges, made of aluminium
  • 30 mm thick side plates are made of aluminium as well

Operational conditions:

  • Operating presure: 1 x 10-6 mbar
  • ISO 6 clearoom compaitibility acc. to EN ISO 14644

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